Process Chamber Body
Used to hold wafers for various processing and treatments. The base is a critical component in semiconductor process equipment. Its design and performance are crucial to the semiconductor manufacturing process and form an important foundation for ensuring product quality and production efficiency.
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Product Characteristics
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Product Parameters
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Product Characteristics
High Precision
High Sealing Requirements
Complex Manufacturing Process
Requires multiple welding and machining steps
Product Parameters
| Material: | Stainless Steel |
| Welding Method: | Electron Beam |
| Surface Treatment： | Electropolishing + Helium Leak Test |
