Cathode Fixing Chassis
Primarily used in Etch equipment, this product works in conjunction with lifting mechanisms, process gas delivery, and RF transmission systems to fix the cathode position and provide grounding.
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Product Characteristics
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Product Parameters
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Product Characteristics
High Precision
High precision equipment parts are fundamental for semiconductor chip manufacturing, especially at the nanometer scale.
Component precision is paramount to ensuring both the accuracy of wafer processing equipment and the effective implementation of its various process functions.
High Cleanliness
High-cleanliness equipment components are fundamental for achieving high yield rates in wafer processing.
The cleanliness of process equipment is critical to achieving high yield rates for wafers and subsequent chips, and can even determine the viability of an entire production line's ability to produce qualified products.
High Corrosion Resistance
Highly corrosion-resistant equipment components are a functional requirement for chip manufacturing equipment.
The corrosion resistance of parts determines the equipment's functionality, reliability, and the frequency of online downtime for maintenance.
Product Parameters
| Material: | Aluminum Alloy |
| Surface Treatment: | Anodization |
