Technology

Stainless Steel Ultra-High Surface Finish Stainless Steel Manufacturing Technology
Employing self-designed tooling in conjunction with precision machining technology such as drilling, milling, and reaming, this technology achieves the stringent surface roughness and hardness specifications required for flow channels, functional surfaces, and sealing surfaces.
Following machining, stainless steel mirror polishing technology is utilized to improve wetted surface roughness, enabling high-quality, high-efficiency mirror polishing even on complex features.
The product's wetted surface roughness meets SEMI standards and surpasses the stringent requirements of leading international clients, enabling laminar gas flow with minimal turbulence to achieve rapid gas delivery response and corrosion resistance.

High Precision Micro-Hole Manufacturing Technology
Micro-hole fabrication is achieved through precise material control and processing. This technology also enables control over hole shape, size, and surface quality, thus meeting the requirements of diverse applications.
Professional high-speed drilling machines and AOI (Automated Optical Inspection) equipment for micro-hole processing and inspection.

High Precision Multi-Station Complex Profile Manufacturing Technology
Complex surface multi-axis simultaneous machining enables one-stop fabrication of large-size chambers and multi-station features, while also providing integrated solutions such as chamber structure optimization and machining plan development.

Plasma Spray Coating Technology
Plasma Spraying (PS) employs a DC power source to generate a high-temperature arc plasma between a cathode and an anode, facilitating the rapid thermal processing of materials, such as ceramics, to a semi-molten phase and subsequent deposition onto a substrate to create a coating layer.

Nanofilm Technology

Aluminum-Based Fluorination
This coating mitigates the reaction between ambient fluorine-containing plasma and the aluminum substrate, thereby ensuring uniform heater element temperature distribution and long-term thermal stability.

High-Performance Electroless Nickel Plating Technology
Certified by leading international clients, Electroless Nickel Plating technology offers a reliable coating solution that enhances component corrosion resistance, improves part performance, and ensures the stability of semiconductor equipment.

Corrosion-Resistant Anodizing Technology
Certified by leading international clients, a range of anodizing technologies (including Hard Anodizing, Sulfuric Anodizing, and Dyed Anodizing) provides reliable coating solutions that enhance component corrosion resistance, improve part performance, and ensure the stability of semiconductor equipment.

High-Cleanliness Precision Cleaning Technology
High-Cleanliness Precision Cleaning technology is certified by leading international clients, providing high-cleanliness cleaning solutions.

LBW Technology
Certified by leading clients and the AWS for laser welding, our processes ensure precise, complex, stable, repeatable, and high-quality welds. We also offer comprehensive welding design capabilities to provide effective solutions tailored to client needs.

EBW Technology
Utilizing imported German electron beam welding equipment, our processes are certified by leading clients and AWS. We deliver precise, complex, stable, repeatable, and high-quality welds, and offer comprehensive welding design capabilities to provide effective solutions tailored to client needs.

Brazing Technology
In the vacuum brazing process, two or more materials are joined by an intermediate layer of one or more filler materials (usually braze alloy). This process is executed within a vacuum or reduced-pressure atmosphere to minimize the partial pressure of oxygen and other reactive species, thereby inhibiting oxidation and other deleterious reactions. The brazing alloy melts at a lower temperature and creates a strong bond between the materials.

超洁净气体传输柜设计技术
我司具有丰富的超洁净气体传输柜设计经验,覆盖80%以上半导体前道工艺干法制程气体传输柜。自主开发智能化设计平台,颠覆传统设计模式,使Gasbox设计标准化、模块化,通过标准数据库搭建,实现设计输出高质量、高效率

超洁净管路焊接技术
我司凭借先进的焊接设备和独特的焊接工艺,致力于打造出符合并超越半导体行业标准的管道焊接产品

超洁净气柜制造技术
我司以建设气柜全球领先装配生产线、领先全球半导体气柜制造模式、提高效率和质量为目的,同时符合气柜生产工艺标准为原则,自主研发自动生产线,改变了传统的生产模式,有更好的过程质量控制。

超洁净气柜检测技术
项目提供一站式自动化、信息化平台,大幅度提高了测试效率和质量,提高检测效率,领先国内气体输送系统功能测试设备