Liner
This product is used inside ETCH reaction chambers as a core process component in direct contact with the equipment's plasma, primarily provides sidewall protection in the plasma etching environment.
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Product Features
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Product Features
Utilizes Anodization on Outer Wall
Protected by high purity yttrium-based coating on inner wall to enhance product lifespan.
Utilizes plasma spray coating technology for the high-purity yttrium-based coating
This component is protected by a coating surface technology that provides extremely high chemical stability, resistance to acids/alkalis, voltage resistance, and plasma corrosion resistance, enabling direct contact with plasma.
High Corrosion Resistance
Highly corrosion-resistant equipment components are a functional requirement for chip manufacturing equipment. The corrosion resistance of parts determines the equipment's functionality, reliability, and the frequency of online downtime for maintenance.
