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High Precision Multi-Station Complex Profile Manufacturing Technology
  • Technical Introduction
  • Technology Features
  • Application Scenarios
  • Core Metrics

High Precision Multi-Station Complex Profile Manufacturing Technology

Complex surface multi-axis simultaneous machining enables one-stop fabrication of large-size chambers and multi-station features, while also providing integrated solutions such as chamber structure optimization and machining plan development.

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High Precision Multi-Station Complex Profile Manufacturing Technology

Technology Features

3500mm large-size chamber

Critical features machined in one sequence

01

Precision multi-station machining

Positional tolerance of critical features < 0.05mm

02

High Precision

Linear dimensions precisely match other components, ensuring high equipment sealing performance.

03

Application Scenarios

Large-size, curved, integrated chamber bodies, such as transfer chambers, rprocess chambers, and main beams, used in etching and thin film deposition equipment.

Large-size, curved, integrated chamber bodies, such as transfer chambers, rprocess chambers, and main beams, used in etching and thin film deposition equipment.

Core Metrics

Special Features

Dimensional Accuracy

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Service Hotline

024-31692130

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