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Plasma Spray Coating Technology
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  • Technical Introduction
  • Technology Features
  • Application Scenarios

Plasma Spray Coating Technology

Plasma Spraying (PS) employs a DC power source to generate a high-temperature arc plasma between a cathode and an anode, facilitating the rapid thermal processing of materials, such as ceramics, to a semi-molten phase and subsequent deposition onto a substrate to create a coating layer.

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Plasma Spray Coating Technology

Technology Features

Coatings generated by Plasma Spraying (PS)

Demonstrates superior chemical stability, corrosion resistance, electrical resistivity, and cleanliness characteristics.

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Application Scenarios

Plasma Sprayed (PS) coatings are commonly employed for components such as liners in etch machines, which are in direct contact with the core reaction zone, as well as in PECVD and ion implantation equipment operating in corrosive electrical and chemical environments. These coatings exhibit excellent resistance to plasmas formed from strong halogen-containing gases such as CF₄, SF₆, Cl₂, and HBr.

Plasma Sprayed (PS) coatings are commonly employed for components such as liners in etch machines, which are in direct contact with the core reaction zone, as well as in PECVD and ion implantation equipment operating in corrosive electrical and chemical environments. These coatings exhibit excellent resistance to plasmas formed from strong halogen-containing gases such as CF₄, SF₆, Cl₂, and HBr.

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