RTP Process GasCabinet
The RTP Process Gas Delivery Control Cabinet is a system employed for precise control of gas delivery in Rapid Thermal Processing (RTP) applications. It ensures stable and safe gas delivery during the RTP process to meet the stringent gas supply requirements of rapid thermal processing.
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Product Features
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Product Parameters
Product Features
High precision flow control:
High-precision valve systems and flow controllers implement accurate delivery and management of specialty gases, ensuring the stability of critical parameters such as gas flow rate and pressure.
Safety and Stability:
The gas box is equipped with safety components such as door interlock switches, pressure safety switches, check valves, and flame detectors to ensure safety. Simultaneously, the equipment incorporates explosion-proof, corrosion-resistant designs, enhancing safety performance.
High Airtightness:
The product utilizes IGS and VCR interface types to achieve high airtightness for semiconductor equipment.
High Cleanliness:
Utilizes high precision filters capable of removing particle impurities larger than 3nm.
Safety Certification:
Passed SEMI S6 safety certification testing.
Product Parameters
| Outboard leakage rate test: | ≤1.0X10-11/mbar·L/s |
| Inboard leakage rate at seat: | ≤1.0X10-9/mbar·L/s |
| Pressure hold test 50psi: | Nitrogen pressure hold test, hold for 12h, pressure drop ≤1% |
| Helium into a bag leakage rate: | ≤1.0X10-9/mbar·L/s;(Optional) |
| Particle test: | (5 particle @ >0.1um) |
| Moisture and oxygen test: | Moisture content ≤10 PPB, Oxygen content ≤10 PPB; (Optional) |
