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超洁净气体传输柜设计技术
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超洁净气体传输柜设计技术

我司具有丰富的超洁净气体传输柜设计经验，覆盖80%以上半导体前道工艺干法制程气体传输柜。自主开发智能化设计平台，颠覆传统设计模式，使Gasbox设计标准化、模块化，通过标准数据库搭建，实现设计输出高质量、高效率

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超洁净气体传输柜设计技术

技术特点

智能化

气路原理(PID)自动识别，根据输入自动建模，生成气路stick&panel；同时配合智能工艺可实现工艺文件一键生成，设计&工艺高效协同

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