UHP Gas Lines
Gas lines for ultra-high purity gas delivery in the semiconductor industry, using HP & UHP grade 316L materials and manufactured in Class 5 & 6 cleanrooms. Requires ultra-high vacuum performance, cleanliness, and corrosion resistance.
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Product Features
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Product Features
High Vacuum:
These products using VCR and K1S type sealing surface structures. To ensure reliable sealing for high vacuum applications, all sealing surfaces and weld locations need 100% helium leak testing during production, according to both customer and semi standards.
High Cleanliness:
Raw material inner surfaces are electropolished (EP) ensure that the roughness below Ra 0.25 μm. UPW cleaning, welding, testing, and packaging are performed within a Class 5 cleanroom environment. UPW with a resistivity of ≥18 MΩ·cm is used for cleaning.
High Corrosion Resistance:
All raw materials are HP & UHP grade 316L stainless steel, inner surfaces electropolished (EP) . By reducing the roughness value of the inner surface of the material, the residual particles and moisture inside the pipe can be decreased, thereby enhancing the corrosion resistance of the parts.
