Vacuum Line
Used for semiconductor equipment exhaust and vacuum treatment systems, manufactured with 304L and 316L stainless steel. These weldment are designed to meet the requirements of vacuum level and cleanliness in semiconductor processing.
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Product Features
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Product Features
Vacuum level:
Products utilize various structures like threaded seals, vacuum flange seals、tube fitting seals and use weld method to connected. Sealing tests such as gas pressure holding and helium leak testing are performed during production according to customer requirements to ensure sealing performance.
Cleanliness:
Raw material inner surfaces are BA (Bright Annealed) or mechanically polished, with roughness controlled below Ra 0.8um. Using degreasing or pickling cleaning to enhance the cleanliness and without compromising the inner surface roughness.
