Cross-Hole Welded Showerhead
This product is used in CVD and ALD equipment for hard mask deposition. It achieves uniform gas control, enabling the deposition of ultra-smooth, homogeneous thin films while meeting the stringent requirements of high-yield, cost-effective production lines.
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Product Features
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Related Solutions
Product Features
High Precision Gas Flow Uniformity
Involves high precision deep hole drilling with aspect ratios over 50:1
High Cleanliness
Extremely complex cross-drilled hole machining and deburring processes
High Vacuum
Challenging welding processes such as Electron Beam Welding (EBW) and Laser Welding