Cross-Hole Welded Showerhead
This product is used in PECVD equipment for hard mask deposition. It achieves uniform gas control, enabling the deposition of ultra-smooth, homogeneous thin films while meeting the stringent requirements of high-yield, cost-effective production lines.
Consult an Expert
-
Product Features
-
Related Solutions
Product Features
High Precision Gas Flow Uniformity
(STD<25mTorr)
Involves high precision deep hole drilling with aspect ratios over 50:1
High Cleanliness
(Particle@0.2um<15ea/cm2)
Extremely complex cross-drilled hole machining and deburring processes
High Vacuum
(<1.0*E-9mBar•L/s)
Challenging welding processes such as Electron Beam Welding (EBW) and Laser Welding
