Chamber Manufacturing and Testing Solutions
Chamber types: reaction chamber, transfer chamber, load lock chamber, main beam, vacuum chamber, etc.
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Addressing Structural Design and Manufacturing Challenges
Based on customer requirements, we provide cost-optimal structural designs along with matching process flows, equipment selection, and process procedures.
Addressing Performance Testing Challenges
Our company independently conducts a comprehensive suite of performance tests—including vacuum level, flow rate, breakdown voltage resistance, and cleanliness testing—ensuring that reaction chambers meet the stringent standards of semiconductor production.
Addressing product cleanliness issues
Our company maintains Class 100 and Class 1000 cleanrooms, employs various precision cleaning processes for producing high-cleanliness products, and possesses trace element and particle detection capabilities to mitigate particle and metal contamination within chambers.
