IGS Standard Block
The IGS standard block employs a modular design, providing reliable sealing and corrosion resistance that meets SEMI standards. Users can build compact gas delivery system structures that are convenient to install and maintain according to different gas configuration needs.
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Product Features
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Product Features
Operating Conditions:
Withstands working pressure up to 7500 PSI; Operating temperature -10 to 200℃
Helium leak rate (outboard) ≤ 1×10⁻¹⁰ Pa·m³/sec
Technical Features:
SEMI F20 UHP material, 316L (VIM+VAR) or 316L (VAR)
Product wet surface undergo EP and passivation processes, wet surface roughness Ra < 0.1μm, wet surface Cr/Fe ratio meets SEMI F19 standards, fulfilling ultra-high purity gas delivery system requirements.
