Fitting - Face Seal Fitting & Accessories
The gland fitting is a metal face seal fitting designed for ultra-high sealing performance and ultra-low leak rates across vacuum to positive pressure ranges. This sealing technique employs a metal gasket compressed between the sealing flanges of two fittings, establishing a high-integrity gas-tight seal secured by threaded connection.
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产品特点
产品特点
Purity:
SEMI F20 UHP material
316L （ VIM+VAR ）or 316L （VAR）
Cleanliness:
Class 100 cleanroom
Ultra-pure water cleaning
EP/ Passivation treatment
The wet surface is specified to have a roughness of Ra < 0.1 μm and a composition that meets SEMI F19 specifications, and ultra-high purity gas delivery system requirements.
